Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber.
نویسندگان
چکیده
In this paper, we present the fabrication and packaging of a cantilever-based airflow sensor integrated with optical fiber. The sensor consists of a micro Fabry-Perot (FP) cavity including a fiber and a micro cantilever that is fabricated using the photolithography method. Airflow causes a small deflection of the micro cantilever and changes the cavity length of the FP, which makes the fringe shift. The pressure distribution and velocity streamlines across the cantilever resulted from the airflow in the channel have been simulated by the finite element method. The experimental results demonstrate that the sensor has a linear sensitivity of 190 [fringe shift (pm)] per (l/min) and a minimum detectable airflow change of 0.05 (l/min).
منابع مشابه
Fabrication and Characterization of the Fiber Optical Taper for a Surface Plasmon Resonance Sensor
For a fiber optical surface plasmon resonance (SPR) sensor a short part of its cladding should be removed to coat a thin layer of a metal. Usually this is problematic when an optical fiber with small core diameter is used. In this paper, a new method using µliter droplet of the HF acid for short fiber optical taper fabrication is reported. Using this method in a multi-mode optical fiber w...
متن کاملA Smart Flow Sensor for Flow Direction Measurement
The purpose of this paper is to apply MEMS techniques to manufacture a gas flow sensor that consists with an airflow rate and airflow direction sensing units for detection of airflow states. This study uses a silicon wafer as a substrate which is deposited silicon nitride layers. To form the airflow rate sensing unit, a micro heater and a sensing resistor are manufactured over a membrane that r...
متن کاملWeight Measurements by Using Simple Optical-Fiber Sensors (RESEARCH NOTE)
The use of different optical-fiber sensors for weighing measurements is Abstract described. By using three different mechanical stressing mechanisms, the operation of the fiber-to-fiber transducer systems are tested and the results are presented. Parameters such as sensitivity, hysteresis, resolution, and dynamic range are measured. A comparison of the results has shown that the sensor system m...
متن کاملAn Overview and Feasibility Study of Fabrication Technology and Characterization Techniques of Erbium-Doped Fiber amplifiers in Iran
In this paper, a brief summary of different methods of fabrication of optical preform and fiber is reviewed. Several methods of incorporation of erbium ions into optical preforms are studied. Characterization of the fabricated erbium doped fibers including measurements of refractive index profile, absorption, fluorescence and gain spectra and metastable lifetime are described. It is also expres...
متن کاملSuper-collimation in a Rod-based Photonic Crystal
Super-collimation is the propagation of a light beam without spreading that occurs when the light beam is guided by the dispersion properties of a photonic crystal, rather than by defects in the photonic crystal. Super-collimation has many potential applications, the most straight-forward of which is in the area of integrated optical circuits, where super-collimation can be utilized for optical...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید
ثبت ناماگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید
ورودعنوان ژورنال:
- Applied optics
دوره 52 14 شماره
صفحات -
تاریخ انتشار 2013